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Effect of abrasive grit size on surface damage of AlN ceramics in precision grinding

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Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture

Published online on

Abstract

Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture, Ahead of Print.
Aluminum nitride (AlN) ceramics are widely used in high-power electronic packaging and thermal management applications owing to their excellent thermal conductivity and electrical insulation properties. However, their high hardness and intrinsic ...