Pressure control method for low-pressure vacuum systems based on mismatch-resistant Smith predictor compensation
Transactions of the Institute of Measurement and Control
Published online on August 11, 2025
Abstract
Transactions of the Institute of Measurement and Control, Ahead of Print.
To achieve efficient and high-precision pressure control for low-pressure vacuum systems, a pressure control method based on mismatch-resistant Smith Predictor (SP) compensation is proposed. First, a control scheme consisting of an SP and a proportional–...
To achieve efficient and high-precision pressure control for low-pressure vacuum systems, a pressure control method based on mismatch-resistant Smith Predictor (SP) compensation is proposed. First, a control scheme consisting of an SP and a proportional–...