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Process-Dependent enhancement of piezoelectric performance in Ga-Doped ZnO thin films for energy harvesting applications

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Proceedings of the Institution of Mechanical Engineers, Part L: Journal of Materials: Design and Applications

Published online on

Abstract

Proceedings of the Institution of Mechanical Engineers, Part L: Journal of Materials: Design and Applications, Ahead of Print.
This study explores the enhancement of piezoelectric properties in zinc oxide (ZnO)-based thin films through gallium (Ga) ion doping using various fabrication processes. Three distinct doping methods and two doping concentrations (1% and 3%) were ...