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The impact of structural design on magnetron-sputtered amorphous thin films

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Proceedings of the Institution of Mechanical Engineers, Part L: Journal of Materials: Design and Applications

Published online on

Abstract

Proceedings of the Institution of Mechanical Engineers, Part L: Journal of Materials: Design and Applications, Ahead of Print.
The mono- and multilayer designs formed with the identical target elements but different sputtering powers were compared. By merely altering the sputtering conditions, it is remarkable to ascertain the impact of the structural design with the same ...