MetaTOC stay on top of your field, easily

Comprehensive simulation study on AlN, ZnO, and PZT-5H piezoelectric materials for microcantilever-based MEMS energy harvesters: Mechanical and electrical insights

, ,

Proceedings of the Institution of Mechanical Engineers, Part E: Journal of Process Mechanical Engineering

Published online on

Abstract

Proceedings of the Institution of Mechanical Engineers, Part E: Journal of Process Mechanical Engineering, Ahead of Print.
The piezoelectric effect involves the generation of electric charge in specific materials when subjected to mechanical stress or strain. This phenomenon is utilized in applications such as sensors, actuators, and energy harvesters. Microelectromechanical ...