Low residual vibration method at the end of picking arm based on fifth-order motion curve planning

Guo-qing Hu, Jian-wei Ma, Yan-zhen Zhang, Zi-qi Zhou, College of Mechanical and Electronic Engineering, China University of Petroleum , East China, State Key Laboratory of High-performance Precision Manufacturing, School of Mechanical Engineering, Dalian University of Technology

Journal of Vibration and Control

Published online on March 25, 2025

Abstract

Journal of Vibration and Control, Volume 32, Issue 9-10, Page 2193-2209, May 2026.
Achieving high efficiency packaging under the premise of high precision is the goal pursued by the semiconductor packaging industry. The high-velocity and stable motion plays an important role in improving the efficiency and accuracy of chips patch. ...