A hybrid-actuated vibration isolator with high stiffness and broadband vibration isolation performance: Design, simulation, and experimental validation

Xiuming Zhang, Lintao Wang, Anpeng Xu, Zhenbang Xu, Yubo Zhang, Space Robotics Engineering Center, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, University of Chinese Academy of Sciences

Journal of Vibration and Control

Published online on April 15, 2026

Abstract

Journal of Vibration and Control, Ahead of Print.
Ultra-precision equipment, such as lithography, inspection, and precision motion platforms, is highly sensitive to environmental vibrations, where even minor disturbances can significantly degrade positioning accuracy and process yield. Under complex ...