A micro-LED release method for transfer technology based on vibration

Jie Bai, Pingjuan Niu, Erdan Gu, School of Mechanical Engineering, Tiangong University, School of Electronic and Information Engineering, Tiangong University, Institute of Photonics, University of Strathclyde

Journal of Vibration and Control

Published online on May 23, 2025

Abstract

Journal of Vibration and Control, Ahead of Print.
Micro-LEDs are suitable as special light sources that serve as small sensors and light sources for optical communication. The most important technology for these applications is Micro-LED high-precision transfer (±0.5 μm positional accuracy). The existing ...