Long-term frequency stabilization of MEMS oscillators based on axial force feedback control

Zihan Jin, Donglei Weng, Hong Jiang, Xuefeng Wang, Zhan Shi, Hongsheng Dai, Xueyong Wei, Ronghua Huan, Department of Mechanics, Zhejiang University, Jiaxing Power Supply Company, State Grid Zhejiang Electric Power Co, Department of Engineering Mechanics, MIIT Key Laboratory of Dynamics and Control of Complex Systems, Northwestern Polytechnical University, School of Engineering, Westlake University, State Key Laboratory for Manufacturing Systems Engineering, an Jiaotong University

Journal of Vibration and Control

Published online on July 23, 2025

Abstract

Journal of Vibration and Control, Ahead of Print.
The frequency stability of MEMS oscillators is critical for delivering precise and reliable reference signals in electronic devices. This paper proposes a long-term frequency stabilization method for MEMS oscillators based on axial force feedback control. ...