Hybrid active-passive micro-vibration isolation for precision equipment using adaptive-network-based fuzzy inference system

Zheng Lu, Weiwei Wu, Mengyao Zhou, Shengqiang Zhao, Guowei Zhang, Wangqiang Xiao, Yongbo Peng, Department of Disaster Mitigation for Structures, Tongji University, State Key Laboratory of Disaster Reduction in Civil Engineering, Tongji University, Multi-Functional Shaking Tables Laboratory, Beijing University of Civil Engineering and Architecture, School of Aerospace Engineering, Xiamen University

Journal of Vibration and Control

Published online on September 26, 2025

Abstract

Journal of Vibration and Control, Ahead of Print.
Conventional vibration isolation techniques fail to meet stringent VC-D and VC-E level requirements specified in Vibration Criteria for precision equipment micro-vibration control. To achieve higher control levels for precision equipment, this study ...