Numerical assessment of floor and active isolation platform vibrations induced by wafer transporting carts under raised-floor irregularities in electronics factories

Chien-Liang Lee, Yung-Tsang Chen, Liang Huang, Yen-Po Wang, School of Civil Engineering and Architecture, Xiamen University of Technology, Department of Civil Engineering, University of Nottingham Ningbo China, Department of Civil Engineering, National Yang Ming Chiao Tung University

Journal of Vibration and Control

Published online on January 02, 2026

Abstract

Journal of Vibration and Control, Ahead of Print.
This study aimed to assess the microvibrations on the production floor and explore the vibration control performance of the active isolation platform (AIP) installed on a moving front opening unified pod (FOUP)-transporting cart (FOUP-TC) carrying fragile ...