Scanning/stepping motion planning for light-damping residual vibration suppression: An asymmetric acceleration S-curve method

Yue Dong, Shuo Song, Li Li, Yang Liu, Jiubin Tan, Center of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Key Lab of Ultra-precision Intelligent Instrumentation , Harbin Institute of Technology, Ministry of Industry and Information Technology, Department of Control Science and Engineering, Harbin Institute of Technology

Journal of Vibration and Control

Published online on March 03, 2026

Abstract

Journal of Vibration and Control, Ahead of Print.
This paper proposes an asymmetric acceleration S-curve (AAS-curve) and its planning method to minimize the residual vibration caused by the light-damping resonance peak for both stepping and scanning motions. Conventional S-curves including the symmetric ...